3/17/2010	12:00:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2010	12:00:03 AM	Recipe started at 12:00 AM
3/17/2010	12:00:03 AM	H2 valve closed
3/17/2010	12:00:03 AM	BCl3 valve closed
3/17/2010	12:00:03 AM	PH3 valve closed
3/17/2010	12:00:03 AM	SiCl4 pre valve closed
3/17/2010	12:00:03 AM	SiCl4 post valve closed
3/17/2010	12:00:03 AM	Main Vac valve closed
3/17/2010	12:00:03 AM	Bypass valve closed
3/17/2010	12:00:03 AM	Bubbler valve closed
3/17/2010	12:00:03 AM	Helium valve opened
3/17/2010	12:00:03 AM	Helium MFC set to  500.000000
3/17/2010	12:00:03 AM	H2 MFC set to  0.000000
3/17/2010	12:00:03 AM	BCl3 MFC set to  0.000000
3/17/2010	12:00:03 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:00:03 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:00:03 AM	Tube furnace set to 0
3/17/2010	12:01:23 AM	Helium valve closed
3/17/2010	12:01:23 AM	H2 valve closed
3/17/2010	12:01:23 AM	BCl3 valve closed
3/17/2010	12:01:23 AM	PH3 valve closed
3/17/2010	12:01:23 AM	SiCl4 pre valve closed
3/17/2010	12:01:23 AM	SiCl4 post valve closed
3/17/2010	12:01:23 AM	Main Vac valve closed
3/17/2010	12:01:23 AM	Bypass valve closed
3/17/2010	12:01:23 AM	Bubbler valve closed
3/17/2010	12:01:23 AM	Helium MFC set to  0.000000
3/17/2010	12:01:23 AM	H2 MFC set to  0.000000
3/17/2010	12:01:23 AM	BCl3 MFC set to  0.000000
3/17/2010	12:01:23 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:01:23 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:01:23 AM	Tube furnace set to 0
3/17/2010	12:01:24 AM	Run finished at 12:01 AM
3/17/2010	12:01:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2010	12:06:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	12:06:12 AM	Recipe started at 12:06 AM
3/17/2010	12:06:12 AM	Helium valve closed
3/17/2010	12:06:12 AM	H2 valve closed
3/17/2010	12:06:12 AM	BCl3 valve closed
3/17/2010	12:06:12 AM	PH3 valve closed
3/17/2010	12:06:12 AM	SiCl4 pre valve closed
3/17/2010	12:06:12 AM	SiCl4 post valve closed
3/17/2010	12:06:12 AM	Main Vac valve closed
3/17/2010	12:06:12 AM	Bubbler valve closed
3/17/2010	12:06:12 AM	Bypass valve opened
3/17/2010	12:06:12 AM	Helium MFC set to  0.000000
3/17/2010	12:06:12 AM	H2 MFC set to  0.000000
3/17/2010	12:06:12 AM	BCl3 MFC set to  0.000000
3/17/2010	12:06:12 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:06:12 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:06:12 AM	Tube furnace set to 0
3/17/2010	12:06:43 AM	Helium valve closed
3/17/2010	12:06:43 AM	H2 valve closed
3/17/2010	12:06:43 AM	BCl3 valve closed
3/17/2010	12:06:43 AM	PH3 valve closed
3/17/2010	12:06:43 AM	SiCl4 pre valve closed
3/17/2010	12:06:43 AM	SiCl4 post valve closed
3/17/2010	12:06:43 AM	Bubbler valve closed
3/17/2010	12:06:43 AM	Main Vac valve opened
3/17/2010	12:06:43 AM	Bypass valve opened
3/17/2010	12:06:43 AM	Helium MFC set to  0.000000
3/17/2010	12:06:43 AM	H2 MFC set to  0.000000
3/17/2010	12:06:43 AM	BCl3 MFC set to  0.000000
3/17/2010	12:06:43 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:06:43 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:06:43 AM	Tube furnace set to 0
3/17/2010	12:06:44 AM	Run finished at 12:06 AM
3/17/2010	12:06:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	12:08:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/17/2010	12:08:35 AM	Recipe started at 12:08 AM
3/17/2010	12:08:35 AM	H2 valve closed
3/17/2010	12:08:35 AM	BCl3 valve closed
3/17/2010	12:08:35 AM	PH3 valve closed
3/17/2010	12:08:35 AM	SiCl4 pre valve closed
3/17/2010	12:08:35 AM	SiCl4 post valve closed
3/17/2010	12:08:35 AM	Main Vac valve closed
3/17/2010	12:08:35 AM	Bypass valve closed
3/17/2010	12:08:35 AM	Bubbler valve closed
3/17/2010	12:08:35 AM	Helium valve opened
3/17/2010	12:08:35 AM	Helium MFC set to  500.000000
3/17/2010	12:08:35 AM	H2 MFC set to  0.000000
3/17/2010	12:08:35 AM	BCl3 MFC set to  0.000000
3/17/2010	12:08:35 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:08:35 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:08:35 AM	Tube furnace set to 0
3/17/2010	12:09:22 AM	Helium valve closed
3/17/2010	12:09:22 AM	H2 valve closed
3/17/2010	12:09:22 AM	BCl3 valve closed
3/17/2010	12:09:22 AM	PH3 valve closed
3/17/2010	12:09:22 AM	SiCl4 pre valve closed
3/17/2010	12:09:22 AM	SiCl4 post valve closed
3/17/2010	12:09:22 AM	Main Vac valve closed
3/17/2010	12:09:22 AM	Bypass valve closed
3/17/2010	12:09:22 AM	Bubbler valve closed
3/17/2010	12:09:22 AM	Helium MFC set to  0.000000
3/17/2010	12:09:22 AM	H2 MFC set to  0.000000
3/17/2010	12:09:22 AM	BCl3 MFC set to  0.000000
3/17/2010	12:09:22 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:09:22 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:09:22 AM	Tube furnace set to 0
3/17/2010	12:09:37 AM	Helium valve closed
3/17/2010	12:09:37 AM	H2 valve closed
3/17/2010	12:09:37 AM	BCl3 valve closed
3/17/2010	12:09:37 AM	PH3 valve closed
3/17/2010	12:09:37 AM	SiCl4 pre valve closed
3/17/2010	12:09:37 AM	SiCl4 post valve closed
3/17/2010	12:09:37 AM	Main Vac valve closed
3/17/2010	12:09:37 AM	Bubbler valve closed
3/17/2010	12:09:37 AM	Bypass valve opened
3/17/2010	12:09:37 AM	Helium MFC set to  0.000000
3/17/2010	12:09:37 AM	H2 MFC set to  0.000000
3/17/2010	12:09:37 AM	BCl3 MFC set to  0.000000
3/17/2010	12:09:37 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:09:37 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:09:37 AM	Tube furnace set to 0
3/17/2010	12:09:56 AM	Helium valve closed
3/17/2010	12:09:56 AM	H2 valve closed
3/17/2010	12:09:56 AM	BCl3 valve closed
3/17/2010	12:09:56 AM	PH3 valve closed
3/17/2010	12:09:56 AM	SiCl4 pre valve closed
3/17/2010	12:09:56 AM	SiCl4 post valve closed
3/17/2010	12:09:56 AM	Bubbler valve closed
3/17/2010	12:09:56 AM	Main Vac valve opened
3/17/2010	12:09:56 AM	Bypass valve opened
3/17/2010	12:09:56 AM	Helium MFC set to  0.000000
3/17/2010	12:09:56 AM	H2 MFC set to  0.000000
3/17/2010	12:09:56 AM	BCl3 MFC set to  0.000000
3/17/2010	12:09:56 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:09:56 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:09:56 AM	Tube furnace set to 0
3/17/2010	12:10:54 AM	Run aborted at 12:10 AM
3/17/2010	12:10:54 AM	Helium valve closed
3/17/2010	12:10:54 AM	H2 valve closed
3/17/2010	12:10:54 AM	BCl3 valve closed
3/17/2010	12:10:54 AM	PH3 valve closed
3/17/2010	12:10:54 AM	SiCl4 pre valve closed
3/17/2010	12:10:54 AM	SiCl4 post valve closed
3/17/2010	12:10:54 AM	Bypass valve closed
3/17/2010	12:10:54 AM	Main Vac valve closed
3/17/2010	12:10:54 AM	Bubbler valve closed
3/17/2010	12:10:54 AM	Helium MFC set to  0.000000
3/17/2010	12:10:54 AM	H2 MFC set to  0.000000
3/17/2010	12:10:54 AM	BCl3 MFC set to  0.000000
3/17/2010	12:10:54 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:10:54 AM	Tube furnace set to 0
3/17/2010	12:10:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/17/2010	12:10:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	12:10:57 AM	Recipe started at 12:10 AM
3/17/2010	12:10:57 AM	Helium valve closed
3/17/2010	12:10:57 AM	H2 valve closed
3/17/2010	12:10:57 AM	BCl3 valve closed
3/17/2010	12:10:57 AM	PH3 valve closed
3/17/2010	12:10:57 AM	SiCl4 pre valve closed
3/17/2010	12:10:57 AM	SiCl4 post valve closed
3/17/2010	12:10:57 AM	Main Vac valve closed
3/17/2010	12:10:57 AM	Bubbler valve closed
3/17/2010	12:10:57 AM	Bypass valve opened
3/17/2010	12:10:57 AM	Helium MFC set to  0.000000
3/17/2010	12:10:57 AM	H2 MFC set to  0.000000
3/17/2010	12:10:57 AM	BCl3 MFC set to  0.000000
3/17/2010	12:10:57 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:10:57 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:10:57 AM	Tube furnace set to 0
3/17/2010	12:10:57 AM	Helium valve closed
3/17/2010	12:10:57 AM	H2 valve closed
3/17/2010	12:10:57 AM	BCl3 valve closed
3/17/2010	12:10:57 AM	PH3 valve closed
3/17/2010	12:10:57 AM	SiCl4 pre valve closed
3/17/2010	12:10:57 AM	SiCl4 post valve closed
3/17/2010	12:10:57 AM	Bubbler valve closed
3/17/2010	12:10:57 AM	Main Vac valve opened
3/17/2010	12:10:57 AM	Bypass valve opened
3/17/2010	12:10:57 AM	Helium MFC set to  0.000000
3/17/2010	12:10:57 AM	H2 MFC set to  0.000000
3/17/2010	12:10:57 AM	BCl3 MFC set to  0.000000
3/17/2010	12:10:57 AM	SiCl4 MFC set to  0.000000
3/17/2010	12:10:57 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:10:57 AM	Tube furnace set to 0
3/17/2010	12:10:57 AM	Run finished at 12:10 AM
3/17/2010	12:10:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	9:18:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2010	9:18:07 AM	Recipe started at 9:18 AM
3/17/2010	9:18:07 AM	H2 valve closed
3/17/2010	9:18:07 AM	BCl3 valve closed
3/17/2010	9:18:07 AM	PH3 valve closed
3/17/2010	9:18:07 AM	SiCl4 pre valve closed
3/17/2010	9:18:07 AM	SiCl4 post valve closed
3/17/2010	9:18:07 AM	Main Vac valve closed
3/17/2010	9:18:07 AM	Bypass valve closed
3/17/2010	9:18:07 AM	Bubbler valve closed
3/17/2010	9:18:07 AM	Helium valve opened
3/17/2010	9:18:07 AM	Helium MFC set to  500.000000
3/17/2010	9:18:07 AM	H2 MFC set to  0.000000
3/17/2010	9:18:07 AM	BCl3 MFC set to  0.000000
3/17/2010	9:18:07 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:18:07 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:18:07 AM	Tube furnace set to 0
3/17/2010	9:19:28 AM	Helium valve closed
3/17/2010	9:19:28 AM	H2 valve closed
3/17/2010	9:19:28 AM	BCl3 valve closed
3/17/2010	9:19:28 AM	PH3 valve closed
3/17/2010	9:19:28 AM	SiCl4 pre valve closed
3/17/2010	9:19:28 AM	SiCl4 post valve closed
3/17/2010	9:19:28 AM	Main Vac valve closed
3/17/2010	9:19:28 AM	Bypass valve closed
3/17/2010	9:19:28 AM	Bubbler valve closed
3/17/2010	9:19:28 AM	Helium MFC set to  0.000000
3/17/2010	9:19:28 AM	H2 MFC set to  0.000000
3/17/2010	9:19:28 AM	BCl3 MFC set to  0.000000
3/17/2010	9:19:28 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:19:28 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:19:28 AM	Tube furnace set to 0
3/17/2010	9:19:29 AM	Run finished at 9:19 AM
3/17/2010	9:19:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2010	9:22:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	9:22:11 AM	Recipe started at 9:22 AM
3/17/2010	9:22:11 AM	Helium valve closed
3/17/2010	9:22:11 AM	H2 valve closed
3/17/2010	9:22:11 AM	BCl3 valve closed
3/17/2010	9:22:11 AM	PH3 valve closed
3/17/2010	9:22:11 AM	SiCl4 pre valve closed
3/17/2010	9:22:11 AM	SiCl4 post valve closed
3/17/2010	9:22:11 AM	Main Vac valve closed
3/17/2010	9:22:11 AM	Bubbler valve closed
3/17/2010	9:22:11 AM	Bypass valve opened
3/17/2010	9:22:11 AM	Helium MFC set to  0.000000
3/17/2010	9:22:11 AM	H2 MFC set to  0.000000
3/17/2010	9:22:11 AM	BCl3 MFC set to  0.000000
3/17/2010	9:22:11 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:22:11 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:22:11 AM	Tube furnace set to 0
3/17/2010	9:22:41 AM	Helium valve closed
3/17/2010	9:22:41 AM	H2 valve closed
3/17/2010	9:22:41 AM	BCl3 valve closed
3/17/2010	9:22:41 AM	PH3 valve closed
3/17/2010	9:22:41 AM	SiCl4 pre valve closed
3/17/2010	9:22:41 AM	SiCl4 post valve closed
3/17/2010	9:22:41 AM	Bubbler valve closed
3/17/2010	9:22:41 AM	Main Vac valve opened
3/17/2010	9:22:41 AM	Bypass valve opened
3/17/2010	9:22:41 AM	Helium MFC set to  0.000000
3/17/2010	9:22:41 AM	H2 MFC set to  0.000000
3/17/2010	9:22:41 AM	BCl3 MFC set to  0.000000
3/17/2010	9:22:41 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:22:41 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:22:41 AM	Tube furnace set to 0
3/17/2010	9:22:42 AM	Run finished at 9:22 AM
3/17/2010	9:22:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	9:28:33 AM	Recipe started at 9:28 AM
3/17/2010	9:28:33 AM	Helium valve closed
3/17/2010	9:28:33 AM	H2 valve closed
3/17/2010	9:28:33 AM	BCl3 valve closed
3/17/2010	9:28:33 AM	PH3 valve closed
3/17/2010	9:28:33 AM	SiCl4 pre valve closed
3/17/2010	9:28:33 AM	SiCl4 post valve closed
3/17/2010	9:28:33 AM	Main Vac valve closed
3/17/2010	9:28:33 AM	Bubbler valve closed
3/17/2010	9:28:33 AM	Bypass valve opened
3/17/2010	9:28:33 AM	Helium MFC set to  0.000000
3/17/2010	9:28:33 AM	H2 MFC set to  0.000000
3/17/2010	9:28:33 AM	BCl3 MFC set to  0.000000
3/17/2010	9:28:33 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:28:33 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:28:33 AM	Tube furnace set to 0
3/17/2010	9:28:33 AM	Helium valve closed
3/17/2010	9:28:33 AM	H2 valve closed
3/17/2010	9:28:33 AM	BCl3 valve closed
3/17/2010	9:28:33 AM	PH3 valve closed
3/17/2010	9:28:33 AM	SiCl4 pre valve closed
3/17/2010	9:28:33 AM	SiCl4 post valve closed
3/17/2010	9:28:33 AM	Bubbler valve closed
3/17/2010	9:28:33 AM	Main Vac valve opened
3/17/2010	9:28:33 AM	Bypass valve opened
3/17/2010	9:28:33 AM	Helium MFC set to  0.000000
3/17/2010	9:28:33 AM	H2 MFC set to  0.000000
3/17/2010	9:28:33 AM	BCl3 MFC set to  0.000000
3/17/2010	9:28:33 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:28:33 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:28:33 AM	Tube furnace set to 0
3/17/2010	9:31:34 AM	H2 valve closed
3/17/2010	9:31:34 AM	BCl3 valve closed
3/17/2010	9:31:34 AM	PH3 valve closed
3/17/2010	9:31:34 AM	SiCl4 pre valve closed
3/17/2010	9:31:34 AM	SiCl4 post valve closed
3/17/2010	9:31:34 AM	Bubbler valve closed
3/17/2010	9:31:34 AM	Helium valve opened
3/17/2010	9:31:34 AM	Main Vac valve opened
3/17/2010	9:31:34 AM	Bypass valve opened
3/17/2010	9:31:34 AM	Helium MFC set to  100.000000
3/17/2010	9:31:34 AM	H2 MFC set to  0.000000
3/17/2010	9:31:34 AM	BCl3 MFC set to  0.000000
3/17/2010	9:31:34 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:31:34 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:31:34 AM	Tube furnace set to 0
3/17/2010	9:33:34 AM	Helium valve closed
3/17/2010	9:33:34 AM	H2 valve closed
3/17/2010	9:33:34 AM	BCl3 valve closed
3/17/2010	9:33:34 AM	PH3 valve closed
3/17/2010	9:33:34 AM	SiCl4 pre valve closed
3/17/2010	9:33:34 AM	SiCl4 post valve closed
3/17/2010	9:33:34 AM	Bubbler valve closed
3/17/2010	9:33:34 AM	Main Vac valve opened
3/17/2010	9:33:34 AM	Bypass valve opened
3/17/2010	9:33:34 AM	Helium MFC set to  0.000000
3/17/2010	9:33:34 AM	H2 MFC set to  0.000000
3/17/2010	9:33:34 AM	BCl3 MFC set to  0.000000
3/17/2010	9:33:34 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:33:34 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:33:34 AM	Tube furnace set to 0
3/17/2010	9:38:18 AM	H2 valve closed
3/17/2010	9:38:18 AM	BCl3 valve closed
3/17/2010	9:38:18 AM	PH3 valve closed
3/17/2010	9:38:18 AM	SiCl4 pre valve closed
3/17/2010	9:38:18 AM	SiCl4 post valve closed
3/17/2010	9:38:18 AM	Bubbler valve closed
3/17/2010	9:38:18 AM	Helium valve opened
3/17/2010	9:38:18 AM	Main Vac valve opened
3/17/2010	9:38:18 AM	Bypass valve opened
3/17/2010	9:38:18 AM	Helium MFC set to  100.000000
3/17/2010	9:38:18 AM	H2 MFC set to  0.000000
3/17/2010	9:38:18 AM	BCl3 MFC set to  0.000000
3/17/2010	9:38:18 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:38:18 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:38:18 AM	Tube furnace set to 0
3/17/2010	9:40:18 AM	Helium valve closed
3/17/2010	9:40:18 AM	H2 valve closed
3/17/2010	9:40:18 AM	BCl3 valve closed
3/17/2010	9:40:18 AM	PH3 valve closed
3/17/2010	9:40:18 AM	SiCl4 pre valve closed
3/17/2010	9:40:18 AM	SiCl4 post valve closed
3/17/2010	9:40:18 AM	Bubbler valve closed
3/17/2010	9:40:18 AM	Main Vac valve opened
3/17/2010	9:40:18 AM	Bypass valve opened
3/17/2010	9:40:18 AM	Helium MFC set to  0.000000
3/17/2010	9:40:18 AM	H2 MFC set to  0.000000
3/17/2010	9:40:18 AM	BCl3 MFC set to  0.000000
3/17/2010	9:40:18 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:40:18 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:40:18 AM	Tube furnace set to 0
3/17/2010	9:42:35 AM	Run finished at 9:42 AM
3/17/2010	9:42:41 AM	Main Vac valve closed
3/17/2010	9:42:44 AM	Bypass valve closed
3/17/2010	9:42:55 AM	Bypass valve opened
3/17/2010	9:42:57 AM	Main Vac valve opened
3/17/2010	9:44:04 AM	Recipe started at 9:44 AM
3/17/2010	9:44:04 AM	Helium valve closed
3/17/2010	9:44:04 AM	BCl3 valve closed
3/17/2010	9:44:04 AM	PH3 valve closed
3/17/2010	9:44:04 AM	SiCl4 pre valve closed
3/17/2010	9:44:04 AM	SiCl4 post valve closed
3/17/2010	9:44:04 AM	Main Vac valve closed
3/17/2010	9:44:04 AM	Bypass valve closed
3/17/2010	9:44:04 AM	Bubbler valve closed
3/17/2010	9:44:04 AM	H2 valve opened
3/17/2010	9:44:04 AM	Helium MFC set to  0.000000
3/17/2010	9:44:04 AM	H2 MFC set to  500.000000
3/17/2010	9:44:04 AM	BCl3 MFC set to  0.000000
3/17/2010	9:44:04 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:44:04 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:44:04 AM	Tube furnace set to 0
3/17/2010	9:45:27 AM	Helium valve closed
3/17/2010	9:45:27 AM	BCl3 valve closed
3/17/2010	9:45:27 AM	PH3 valve closed
3/17/2010	9:45:27 AM	SiCl4 pre valve closed
3/17/2010	9:45:27 AM	SiCl4 post valve closed
3/17/2010	9:45:27 AM	Main Vac valve closed
3/17/2010	9:45:27 AM	Bypass valve closed
3/17/2010	9:45:27 AM	H2 valve opened
3/17/2010	9:45:27 AM	Bubbler valve opened
3/17/2010	9:45:27 AM	Helium MFC set to  0.000000
3/17/2010	9:45:27 AM	H2 MFC set to  500.000000
3/17/2010	9:45:27 AM	BCl3 MFC set to  0.000000
3/17/2010	9:45:27 AM	SiCl4 MFC set to  0.000000
3/17/2010	9:45:27 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	9:45:27 AM	Tube furnace set to 0
3/17/2010	10:08:28 AM	Helium valve closed
3/17/2010	10:08:28 AM	PH3 valve closed
3/17/2010	10:08:28 AM	Main Vac valve closed
3/17/2010	10:08:28 AM	Bypass valve closed
3/17/2010	10:08:28 AM	H2 valve opened
3/17/2010	10:08:28 AM	BCl3 valve opened
3/17/2010	10:08:28 AM	SiCl4 pre valve opened
3/17/2010	10:08:28 AM	SiCl4 post valve opened
3/17/2010	10:08:28 AM	Bubbler valve opened
3/17/2010	10:08:28 AM	Helium MFC set to  0.000000
3/17/2010	10:08:28 AM	H2 MFC set to  465.000000
3/17/2010	10:08:28 AM	BCl3 MFC set to  35.000000
3/17/2010	10:08:28 AM	SiCl4 MFC set to  325.000000
3/17/2010	10:08:28 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	10:08:28 AM	Tube furnace set to 0
3/17/2010	10:28:28 AM	Helium valve closed
3/17/2010	10:28:28 AM	BCl3 valve closed
3/17/2010	10:28:28 AM	PH3 valve closed
3/17/2010	10:28:28 AM	SiCl4 pre valve closed
3/17/2010	10:28:28 AM	SiCl4 post valve closed
3/17/2010	10:28:28 AM	Main Vac valve closed
3/17/2010	10:28:28 AM	Bypass valve closed
3/17/2010	10:28:28 AM	H2 valve opened
3/17/2010	10:28:28 AM	Bubbler valve opened
3/17/2010	10:28:28 AM	Helium MFC set to  0.000000
3/17/2010	10:28:28 AM	H2 MFC set to  400.000000
3/17/2010	10:28:28 AM	BCl3 MFC set to  0.000000
3/17/2010	10:28:28 AM	SiCl4 MFC set to  0.000000
3/17/2010	10:28:28 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	10:28:28 AM	Tube furnace set to 0
3/17/2010	10:48:28 AM	H2 valve closed
3/17/2010	10:48:28 AM	BCl3 valve closed
3/17/2010	10:48:28 AM	PH3 valve closed
3/17/2010	10:48:28 AM	SiCl4 pre valve closed
3/17/2010	10:48:28 AM	SiCl4 post valve closed
3/17/2010	10:48:28 AM	Main Vac valve closed
3/17/2010	10:48:28 AM	Bypass valve closed
3/17/2010	10:48:28 AM	Helium valve opened
3/17/2010	10:48:28 AM	Bubbler valve opened
3/17/2010	10:48:28 AM	Helium MFC set to  400.000000
3/17/2010	10:48:28 AM	H2 MFC set to  0.000000
3/17/2010	10:48:28 AM	BCl3 MFC set to  0.000000
3/17/2010	10:48:28 AM	SiCl4 MFC set to  0.000000
3/17/2010	10:48:28 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	10:48:28 AM	Tube furnace set to 0
3/17/2010	11:03:28 AM	Helium valve closed
3/17/2010	11:03:28 AM	H2 valve closed
3/17/2010	11:03:28 AM	BCl3 valve closed
3/17/2010	11:03:28 AM	PH3 valve closed
3/17/2010	11:03:28 AM	SiCl4 pre valve closed
3/17/2010	11:03:28 AM	SiCl4 post valve closed
3/17/2010	11:03:28 AM	Main Vac valve closed
3/17/2010	11:03:28 AM	Bypass valve closed
3/17/2010	11:03:28 AM	Bubbler valve closed
3/17/2010	11:03:28 AM	Helium MFC set to  0.000000
3/17/2010	11:03:28 AM	H2 MFC set to  0.000000
3/17/2010	11:03:28 AM	BCl3 MFC set to  0.000000
3/17/2010	11:03:28 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:03:28 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:03:28 AM	Tube furnace set to 0
3/17/2010	11:03:29 AM	Run finished at 11:03 AM
3/17/2010	11:11:23 AM	Recipe started at 11:11 AM
3/17/2010	11:11:23 AM	Helium valve closed
3/17/2010	11:11:23 AM	H2 valve closed
3/17/2010	11:11:23 AM	BCl3 valve closed
3/17/2010	11:11:23 AM	PH3 valve closed
3/17/2010	11:11:23 AM	SiCl4 pre valve closed
3/17/2010	11:11:23 AM	SiCl4 post valve closed
3/17/2010	11:11:23 AM	Main Vac valve closed
3/17/2010	11:11:23 AM	Bubbler valve closed
3/17/2010	11:11:23 AM	Bypass valve opened
3/17/2010	11:11:23 AM	Helium MFC set to  0.000000
3/17/2010	11:11:23 AM	H2 MFC set to  0.000000
3/17/2010	11:11:23 AM	BCl3 MFC set to  0.000000
3/17/2010	11:11:23 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:11:23 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:11:23 AM	Tube furnace set to 0
3/17/2010	11:11:53 AM	Helium valve closed
3/17/2010	11:11:53 AM	H2 valve closed
3/17/2010	11:11:53 AM	BCl3 valve closed
3/17/2010	11:11:53 AM	PH3 valve closed
3/17/2010	11:11:53 AM	SiCl4 pre valve closed
3/17/2010	11:11:53 AM	SiCl4 post valve closed
3/17/2010	11:11:53 AM	Bubbler valve closed
3/17/2010	11:11:53 AM	Main Vac valve opened
3/17/2010	11:11:53 AM	Bypass valve opened
3/17/2010	11:11:53 AM	Helium MFC set to  0.000000
3/17/2010	11:11:53 AM	H2 MFC set to  0.000000
3/17/2010	11:11:53 AM	BCl3 MFC set to  0.000000
3/17/2010	11:11:53 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:11:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:11:53 AM	Tube furnace set to 0
3/17/2010	11:14:54 AM	H2 valve closed
3/17/2010	11:14:54 AM	BCl3 valve closed
3/17/2010	11:14:54 AM	PH3 valve closed
3/17/2010	11:14:54 AM	SiCl4 pre valve closed
3/17/2010	11:14:54 AM	SiCl4 post valve closed
3/17/2010	11:14:54 AM	Bubbler valve closed
3/17/2010	11:14:54 AM	Helium valve opened
3/17/2010	11:14:54 AM	Main Vac valve opened
3/17/2010	11:14:54 AM	Bypass valve opened
3/17/2010	11:14:54 AM	Helium MFC set to  100.000000
3/17/2010	11:14:54 AM	H2 MFC set to  0.000000
3/17/2010	11:14:54 AM	BCl3 MFC set to  0.000000
3/17/2010	11:14:54 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:14:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:14:54 AM	Tube furnace set to 0
3/17/2010	11:16:54 AM	Helium valve closed
3/17/2010	11:16:54 AM	H2 valve closed
3/17/2010	11:16:54 AM	BCl3 valve closed
3/17/2010	11:16:54 AM	PH3 valve closed
3/17/2010	11:16:54 AM	SiCl4 pre valve closed
3/17/2010	11:16:54 AM	SiCl4 post valve closed
3/17/2010	11:16:54 AM	Bubbler valve closed
3/17/2010	11:16:54 AM	Main Vac valve opened
3/17/2010	11:16:54 AM	Bypass valve opened
3/17/2010	11:16:54 AM	Helium MFC set to  0.000000
3/17/2010	11:16:54 AM	H2 MFC set to  0.000000
3/17/2010	11:16:54 AM	BCl3 MFC set to  0.000000
3/17/2010	11:16:54 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:16:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:16:54 AM	Tube furnace set to 0
3/17/2010	11:19:25 AM	H2 valve closed
3/17/2010	11:19:25 AM	BCl3 valve closed
3/17/2010	11:19:25 AM	PH3 valve closed
3/17/2010	11:19:25 AM	SiCl4 pre valve closed
3/17/2010	11:19:25 AM	SiCl4 post valve closed
3/17/2010	11:19:25 AM	Bubbler valve closed
3/17/2010	11:19:25 AM	Helium valve opened
3/17/2010	11:19:25 AM	Main Vac valve opened
3/17/2010	11:19:25 AM	Bypass valve opened
3/17/2010	11:19:25 AM	Helium MFC set to  100.000000
3/17/2010	11:19:25 AM	H2 MFC set to  0.000000
3/17/2010	11:19:25 AM	BCl3 MFC set to  0.000000
3/17/2010	11:19:25 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:19:25 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:19:25 AM	Tube furnace set to 0
3/17/2010	11:21:25 AM	Helium valve closed
3/17/2010	11:21:25 AM	H2 valve closed
3/17/2010	11:21:25 AM	BCl3 valve closed
3/17/2010	11:21:25 AM	PH3 valve closed
3/17/2010	11:21:25 AM	SiCl4 pre valve closed
3/17/2010	11:21:25 AM	SiCl4 post valve closed
3/17/2010	11:21:25 AM	Bubbler valve closed
3/17/2010	11:21:25 AM	Main Vac valve opened
3/17/2010	11:21:25 AM	Bypass valve opened
3/17/2010	11:21:25 AM	Helium MFC set to  0.000000
3/17/2010	11:21:25 AM	H2 MFC set to  0.000000
3/17/2010	11:21:25 AM	BCl3 MFC set to  0.000000
3/17/2010	11:21:25 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:21:25 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:21:25 AM	Tube furnace set to 0
3/17/2010	11:21:39 AM	Run finished at 11:21 AM
3/17/2010	11:22:42 AM	Main Vac valve closed
3/17/2010	11:22:44 AM	Bypass valve closed
3/17/2010	11:23:01 AM	Bypass valve opened
3/17/2010	11:23:01 AM	Main Vac valve opened
3/17/2010	11:23:14 AM	Recipe started at 11:23 AM
3/17/2010	11:23:14 AM	Helium valve closed
3/17/2010	11:23:14 AM	BCl3 valve closed
3/17/2010	11:23:14 AM	PH3 valve closed
3/17/2010	11:23:14 AM	SiCl4 pre valve closed
3/17/2010	11:23:14 AM	SiCl4 post valve closed
3/17/2010	11:23:14 AM	Main Vac valve closed
3/17/2010	11:23:14 AM	Bypass valve closed
3/17/2010	11:23:14 AM	Bubbler valve closed
3/17/2010	11:23:14 AM	H2 valve opened
3/17/2010	11:23:14 AM	Helium MFC set to  0.000000
3/17/2010	11:23:14 AM	H2 MFC set to  500.000000
3/17/2010	11:23:14 AM	BCl3 MFC set to  0.000000
3/17/2010	11:23:14 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:23:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:23:14 AM	Tube furnace set to 0
3/17/2010	11:24:36 AM	Helium valve closed
3/17/2010	11:24:36 AM	BCl3 valve closed
3/17/2010	11:24:36 AM	PH3 valve closed
3/17/2010	11:24:36 AM	SiCl4 pre valve closed
3/17/2010	11:24:36 AM	SiCl4 post valve closed
3/17/2010	11:24:36 AM	Main Vac valve closed
3/17/2010	11:24:36 AM	Bypass valve closed
3/17/2010	11:24:36 AM	H2 valve opened
3/17/2010	11:24:36 AM	Bubbler valve opened
3/17/2010	11:24:36 AM	Helium MFC set to  0.000000
3/17/2010	11:24:36 AM	H2 MFC set to  500.000000
3/17/2010	11:24:36 AM	BCl3 MFC set to  0.000000
3/17/2010	11:24:36 AM	SiCl4 MFC set to  0.000000
3/17/2010	11:24:36 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:24:36 AM	Tube furnace set to 0
3/17/2010	11:47:36 AM	Helium valve closed
3/17/2010	11:47:36 AM	PH3 valve closed
3/17/2010	11:47:36 AM	Main Vac valve closed
3/17/2010	11:47:36 AM	Bypass valve closed
3/17/2010	11:47:36 AM	H2 valve opened
3/17/2010	11:47:36 AM	BCl3 valve opened
3/17/2010	11:47:36 AM	SiCl4 pre valve opened
3/17/2010	11:47:36 AM	SiCl4 post valve opened
3/17/2010	11:47:36 AM	Bubbler valve opened
3/17/2010	11:47:36 AM	Helium MFC set to  0.000000
3/17/2010	11:47:36 AM	H2 MFC set to  465.000000
3/17/2010	11:47:36 AM	BCl3 MFC set to  35.000000
3/17/2010	11:47:36 AM	SiCl4 MFC set to  350.000000
3/17/2010	11:47:36 AM	Bypass solenoid MFC set to  0.000000
3/17/2010	11:47:36 AM	Tube furnace set to 0
3/17/2010	12:07:37 PM	Helium valve closed
3/17/2010	12:07:37 PM	BCl3 valve closed
3/17/2010	12:07:37 PM	PH3 valve closed
3/17/2010	12:07:37 PM	SiCl4 pre valve closed
3/17/2010	12:07:37 PM	SiCl4 post valve closed
3/17/2010	12:07:37 PM	Main Vac valve closed
3/17/2010	12:07:37 PM	Bypass valve closed
3/17/2010	12:07:37 PM	H2 valve opened
3/17/2010	12:07:37 PM	Bubbler valve opened
3/17/2010	12:07:37 PM	Helium MFC set to  0.000000
3/17/2010	12:07:37 PM	H2 MFC set to  400.000000
3/17/2010	12:07:37 PM	BCl3 MFC set to  0.000000
3/17/2010	12:07:37 PM	SiCl4 MFC set to  0.000000
3/17/2010	12:07:37 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:07:37 PM	Tube furnace set to 0
3/17/2010	12:27:37 PM	H2 valve closed
3/17/2010	12:27:37 PM	BCl3 valve closed
3/17/2010	12:27:37 PM	PH3 valve closed
3/17/2010	12:27:37 PM	SiCl4 pre valve closed
3/17/2010	12:27:37 PM	SiCl4 post valve closed
3/17/2010	12:27:37 PM	Main Vac valve closed
3/17/2010	12:27:37 PM	Bypass valve closed
3/17/2010	12:27:37 PM	Helium valve opened
3/17/2010	12:27:37 PM	Bubbler valve opened
3/17/2010	12:27:37 PM	Helium MFC set to  400.000000
3/17/2010	12:27:37 PM	H2 MFC set to  0.000000
3/17/2010	12:27:37 PM	BCl3 MFC set to  0.000000
3/17/2010	12:27:37 PM	SiCl4 MFC set to  0.000000
3/17/2010	12:27:37 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:27:37 PM	Tube furnace set to 0
3/17/2010	12:42:37 PM	Helium valve closed
3/17/2010	12:42:37 PM	H2 valve closed
3/17/2010	12:42:37 PM	BCl3 valve closed
3/17/2010	12:42:37 PM	PH3 valve closed
3/17/2010	12:42:37 PM	SiCl4 pre valve closed
3/17/2010	12:42:37 PM	SiCl4 post valve closed
3/17/2010	12:42:37 PM	Main Vac valve closed
3/17/2010	12:42:37 PM	Bypass valve closed
3/17/2010	12:42:37 PM	Bubbler valve closed
3/17/2010	12:42:37 PM	Helium MFC set to  0.000000
3/17/2010	12:42:37 PM	H2 MFC set to  0.000000
3/17/2010	12:42:37 PM	BCl3 MFC set to  0.000000
3/17/2010	12:42:37 PM	SiCl4 MFC set to  0.000000
3/17/2010	12:42:37 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	12:42:37 PM	Tube furnace set to 0
3/17/2010	12:42:38 PM	Run finished at 12:42 PM
3/17/2010	1:18:29 PM	Recipe started at 1:18 PM
3/17/2010	1:18:29 PM	Helium valve closed
3/17/2010	1:18:29 PM	H2 valve closed
3/17/2010	1:18:29 PM	BCl3 valve closed
3/17/2010	1:18:29 PM	PH3 valve closed
3/17/2010	1:18:29 PM	SiCl4 pre valve closed
3/17/2010	1:18:29 PM	SiCl4 post valve closed
3/17/2010	1:18:29 PM	Main Vac valve closed
3/17/2010	1:18:29 PM	Bubbler valve closed
3/17/2010	1:18:29 PM	Bypass valve opened
3/17/2010	1:18:29 PM	Helium MFC set to  0.000000
3/17/2010	1:18:29 PM	H2 MFC set to  0.000000
3/17/2010	1:18:29 PM	BCl3 MFC set to  0.000000
3/17/2010	1:18:29 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:18:29 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:18:29 PM	Tube furnace set to 0
3/17/2010	1:19:00 PM	Helium valve closed
3/17/2010	1:19:00 PM	H2 valve closed
3/17/2010	1:19:00 PM	BCl3 valve closed
3/17/2010	1:19:00 PM	PH3 valve closed
3/17/2010	1:19:00 PM	SiCl4 pre valve closed
3/17/2010	1:19:00 PM	SiCl4 post valve closed
3/17/2010	1:19:00 PM	Bubbler valve closed
3/17/2010	1:19:00 PM	Main Vac valve opened
3/17/2010	1:19:00 PM	Bypass valve opened
3/17/2010	1:19:00 PM	Helium MFC set to  0.000000
3/17/2010	1:19:00 PM	H2 MFC set to  0.000000
3/17/2010	1:19:00 PM	BCl3 MFC set to  0.000000
3/17/2010	1:19:00 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:19:00 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:19:00 PM	Tube furnace set to 0
3/17/2010	1:22:01 PM	H2 valve closed
3/17/2010	1:22:01 PM	BCl3 valve closed
3/17/2010	1:22:01 PM	PH3 valve closed
3/17/2010	1:22:01 PM	SiCl4 pre valve closed
3/17/2010	1:22:01 PM	SiCl4 post valve closed
3/17/2010	1:22:01 PM	Bubbler valve closed
3/17/2010	1:22:01 PM	Helium valve opened
3/17/2010	1:22:01 PM	Main Vac valve opened
3/17/2010	1:22:01 PM	Bypass valve opened
3/17/2010	1:22:01 PM	Helium MFC set to  100.000000
3/17/2010	1:22:01 PM	H2 MFC set to  0.000000
3/17/2010	1:22:01 PM	BCl3 MFC set to  0.000000
3/17/2010	1:22:01 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:22:01 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:22:01 PM	Tube furnace set to 0
3/17/2010	1:24:01 PM	Helium valve closed
3/17/2010	1:24:01 PM	H2 valve closed
3/17/2010	1:24:01 PM	BCl3 valve closed
3/17/2010	1:24:01 PM	PH3 valve closed
3/17/2010	1:24:01 PM	SiCl4 pre valve closed
3/17/2010	1:24:01 PM	SiCl4 post valve closed
3/17/2010	1:24:01 PM	Bubbler valve closed
3/17/2010	1:24:01 PM	Main Vac valve opened
3/17/2010	1:24:01 PM	Bypass valve opened
3/17/2010	1:24:01 PM	Helium MFC set to  0.000000
3/17/2010	1:24:01 PM	H2 MFC set to  0.000000
3/17/2010	1:24:01 PM	BCl3 MFC set to  0.000000
3/17/2010	1:24:01 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:24:01 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:24:01 PM	Tube furnace set to 0
3/17/2010	1:29:01 PM	H2 valve closed
3/17/2010	1:29:01 PM	BCl3 valve closed
3/17/2010	1:29:01 PM	PH3 valve closed
3/17/2010	1:29:01 PM	SiCl4 pre valve closed
3/17/2010	1:29:01 PM	SiCl4 post valve closed
3/17/2010	1:29:01 PM	Bubbler valve closed
3/17/2010	1:29:01 PM	Helium valve opened
3/17/2010	1:29:01 PM	Main Vac valve opened
3/17/2010	1:29:01 PM	Bypass valve opened
3/17/2010	1:29:01 PM	Helium MFC set to  100.000000
3/17/2010	1:29:01 PM	H2 MFC set to  0.000000
3/17/2010	1:29:01 PM	BCl3 MFC set to  0.000000
3/17/2010	1:29:01 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:29:01 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:29:01 PM	Tube furnace set to 0
3/17/2010	1:31:02 PM	Helium valve closed
3/17/2010	1:31:02 PM	H2 valve closed
3/17/2010	1:31:02 PM	BCl3 valve closed
3/17/2010	1:31:02 PM	PH3 valve closed
3/17/2010	1:31:02 PM	SiCl4 pre valve closed
3/17/2010	1:31:02 PM	SiCl4 post valve closed
3/17/2010	1:31:02 PM	Bubbler valve closed
3/17/2010	1:31:02 PM	Main Vac valve opened
3/17/2010	1:31:02 PM	Bypass valve opened
3/17/2010	1:31:02 PM	Helium MFC set to  0.000000
3/17/2010	1:31:02 PM	H2 MFC set to  0.000000
3/17/2010	1:31:02 PM	BCl3 MFC set to  0.000000
3/17/2010	1:31:02 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:31:02 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:31:02 PM	Tube furnace set to 0
3/17/2010	1:34:02 PM	Run finished at 1:34 PM
3/17/2010	1:35:31 PM	Main Vac valve closed
3/17/2010	1:35:33 PM	Bypass valve closed
3/17/2010	1:35:40 PM	Bypass valve opened
3/17/2010	1:35:41 PM	Main Vac valve opened
3/17/2010	1:36:30 PM	Recipe started at 1:36 PM
3/17/2010	1:36:30 PM	Helium valve closed
3/17/2010	1:36:30 PM	BCl3 valve closed
3/17/2010	1:36:30 PM	PH3 valve closed
3/17/2010	1:36:30 PM	SiCl4 pre valve closed
3/17/2010	1:36:30 PM	SiCl4 post valve closed
3/17/2010	1:36:30 PM	Main Vac valve closed
3/17/2010	1:36:30 PM	Bypass valve closed
3/17/2010	1:36:30 PM	Bubbler valve closed
3/17/2010	1:36:30 PM	H2 valve opened
3/17/2010	1:36:30 PM	Helium MFC set to  0.000000
3/17/2010	1:36:30 PM	H2 MFC set to  500.000000
3/17/2010	1:36:30 PM	BCl3 MFC set to  0.000000
3/17/2010	1:36:30 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:36:30 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:36:30 PM	Tube furnace set to 0
3/17/2010	1:37:53 PM	Helium valve closed
3/17/2010	1:37:53 PM	BCl3 valve closed
3/17/2010	1:37:53 PM	PH3 valve closed
3/17/2010	1:37:53 PM	SiCl4 pre valve closed
3/17/2010	1:37:53 PM	SiCl4 post valve closed
3/17/2010	1:37:53 PM	Main Vac valve closed
3/17/2010	1:37:53 PM	Bypass valve closed
3/17/2010	1:37:53 PM	H2 valve opened
3/17/2010	1:37:53 PM	Bubbler valve opened
3/17/2010	1:37:53 PM	Helium MFC set to  0.000000
3/17/2010	1:37:53 PM	H2 MFC set to  500.000000
3/17/2010	1:37:53 PM	BCl3 MFC set to  0.000000
3/17/2010	1:37:53 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:37:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:37:53 PM	Tube furnace set to 0
3/17/2010	1:40:27 PM	Run aborted at 1:40 PM
3/17/2010	1:40:27 PM	Helium valve closed
3/17/2010	1:40:27 PM	H2 valve closed
3/17/2010	1:40:27 PM	BCl3 valve closed
3/17/2010	1:40:27 PM	PH3 valve closed
3/17/2010	1:40:27 PM	SiCl4 pre valve closed
3/17/2010	1:40:27 PM	SiCl4 post valve closed
3/17/2010	1:40:27 PM	Bypass valve closed
3/17/2010	1:40:27 PM	Main Vac valve closed
3/17/2010	1:40:27 PM	Bubbler valve closed
3/17/2010	1:40:27 PM	Helium MFC set to  0.000000
3/17/2010	1:40:27 PM	H2 MFC set to  0.000000
3/17/2010	1:40:27 PM	BCl3 MFC set to  0.000000
3/17/2010	1:40:27 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:40:27 PM	Tube furnace set to 0
3/17/2010	1:40:53 PM	Recipe started at 1:40 PM
3/17/2010	1:40:53 PM	Helium valve closed
3/17/2010	1:40:53 PM	BCl3 valve closed
3/17/2010	1:40:53 PM	PH3 valve closed
3/17/2010	1:40:53 PM	SiCl4 pre valve closed
3/17/2010	1:40:53 PM	SiCl4 post valve closed
3/17/2010	1:40:53 PM	Main Vac valve closed
3/17/2010	1:40:53 PM	Bypass valve closed
3/17/2010	1:40:53 PM	Bubbler valve closed
3/17/2010	1:40:53 PM	H2 valve opened
3/17/2010	1:40:53 PM	Helium MFC set to  0.000000
3/17/2010	1:40:53 PM	H2 MFC set to  500.000000
3/17/2010	1:40:53 PM	BCl3 MFC set to  0.000000
3/17/2010	1:40:53 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:40:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:40:53 PM	Tube furnace set to 0
3/17/2010	1:40:54 PM	Helium valve closed
3/17/2010	1:40:54 PM	BCl3 valve closed
3/17/2010	1:40:54 PM	PH3 valve closed
3/17/2010	1:40:54 PM	SiCl4 pre valve closed
3/17/2010	1:40:54 PM	SiCl4 post valve closed
3/17/2010	1:40:54 PM	Main Vac valve closed
3/17/2010	1:40:54 PM	Bypass valve closed
3/17/2010	1:40:54 PM	H2 valve opened
3/17/2010	1:40:54 PM	Bubbler valve opened
3/17/2010	1:40:54 PM	Helium MFC set to  0.000000
3/17/2010	1:40:54 PM	H2 MFC set to  500.000000
3/17/2010	1:40:54 PM	BCl3 MFC set to  0.000000
3/17/2010	1:40:54 PM	SiCl4 MFC set to  0.000000
3/17/2010	1:40:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	1:40:54 PM	Tube furnace set to 0
3/17/2010	2:00:54 PM	Helium valve closed
3/17/2010	2:00:54 PM	PH3 valve closed
3/17/2010	2:00:54 PM	Main Vac valve closed
3/17/2010	2:00:54 PM	Bypass valve closed
3/17/2010	2:00:54 PM	H2 valve opened
3/17/2010	2:00:54 PM	BCl3 valve opened
3/17/2010	2:00:54 PM	SiCl4 pre valve opened
3/17/2010	2:00:54 PM	SiCl4 post valve opened
3/17/2010	2:00:54 PM	Bubbler valve opened
3/17/2010	2:00:54 PM	Helium MFC set to  0.000000
3/17/2010	2:00:54 PM	H2 MFC set to  500.000000
3/17/2010	2:00:54 PM	BCl3 MFC set to  35.000000
3/17/2010	2:00:54 PM	SiCl4 MFC set to  400.000000
3/17/2010	2:00:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	2:00:54 PM	Tube furnace set to 0
3/17/2010	2:20:55 PM	Helium valve closed
3/17/2010	2:20:55 PM	BCl3 valve closed
3/17/2010	2:20:55 PM	PH3 valve closed
3/17/2010	2:20:55 PM	SiCl4 pre valve closed
3/17/2010	2:20:55 PM	SiCl4 post valve closed
3/17/2010	2:20:55 PM	Main Vac valve closed
3/17/2010	2:20:55 PM	Bypass valve closed
3/17/2010	2:20:55 PM	H2 valve opened
3/17/2010	2:20:55 PM	Bubbler valve opened
3/17/2010	2:20:55 PM	Helium MFC set to  0.000000
3/17/2010	2:20:55 PM	H2 MFC set to  400.000000
3/17/2010	2:20:55 PM	BCl3 MFC set to  0.000000
3/17/2010	2:20:55 PM	SiCl4 MFC set to  0.000000
3/17/2010	2:20:55 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	2:20:55 PM	Tube furnace set to 0
3/17/2010	2:40:55 PM	H2 valve closed
3/17/2010	2:40:55 PM	BCl3 valve closed
3/17/2010	2:40:55 PM	PH3 valve closed
3/17/2010	2:40:55 PM	SiCl4 pre valve closed
3/17/2010	2:40:55 PM	SiCl4 post valve closed
3/17/2010	2:40:55 PM	Main Vac valve closed
3/17/2010	2:40:55 PM	Bypass valve closed
3/17/2010	2:40:55 PM	Helium valve opened
3/17/2010	2:40:55 PM	Bubbler valve opened
3/17/2010	2:40:55 PM	Helium MFC set to  400.000000
3/17/2010	2:40:55 PM	H2 MFC set to  0.000000
3/17/2010	2:40:55 PM	BCl3 MFC set to  0.000000
3/17/2010	2:40:55 PM	SiCl4 MFC set to  0.000000
3/17/2010	2:40:55 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	2:40:55 PM	Tube furnace set to 0
3/17/2010	2:55:55 PM	Helium valve closed
3/17/2010	2:55:55 PM	H2 valve closed
3/17/2010	2:55:55 PM	BCl3 valve closed
3/17/2010	2:55:55 PM	PH3 valve closed
3/17/2010	2:55:55 PM	SiCl4 pre valve closed
3/17/2010	2:55:55 PM	SiCl4 post valve closed
3/17/2010	2:55:55 PM	Main Vac valve closed
3/17/2010	2:55:55 PM	Bypass valve closed
3/17/2010	2:55:55 PM	Bubbler valve closed
3/17/2010	2:55:55 PM	Helium MFC set to  0.000000
3/17/2010	2:55:55 PM	H2 MFC set to  0.000000
3/17/2010	2:55:55 PM	BCl3 MFC set to  0.000000
3/17/2010	2:55:55 PM	SiCl4 MFC set to  0.000000
3/17/2010	2:55:55 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	2:55:55 PM	Tube furnace set to 0
3/17/2010	2:55:56 PM	Run finished at 2:55 PM
3/17/2010	3:04:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	3:04:58 PM	Recipe started at 3:04 PM
3/17/2010	3:04:58 PM	Helium valve closed
3/17/2010	3:04:58 PM	H2 valve closed
3/17/2010	3:04:58 PM	BCl3 valve closed
3/17/2010	3:04:58 PM	PH3 valve closed
3/17/2010	3:04:58 PM	SiCl4 pre valve closed
3/17/2010	3:04:58 PM	SiCl4 post valve closed
3/17/2010	3:04:58 PM	Main Vac valve closed
3/17/2010	3:04:58 PM	Bubbler valve closed
3/17/2010	3:04:58 PM	Bypass valve opened
3/17/2010	3:04:58 PM	Helium MFC set to  0.000000
3/17/2010	3:04:58 PM	H2 MFC set to  0.000000
3/17/2010	3:04:58 PM	BCl3 MFC set to  0.000000
3/17/2010	3:04:58 PM	SiCl4 MFC set to  0.000000
3/17/2010	3:04:58 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	3:04:58 PM	Tube furnace set to 0
3/17/2010	3:05:30 PM	Helium valve closed
3/17/2010	3:05:30 PM	H2 valve closed
3/17/2010	3:05:30 PM	BCl3 valve closed
3/17/2010	3:05:30 PM	PH3 valve closed
3/17/2010	3:05:30 PM	SiCl4 pre valve closed
3/17/2010	3:05:30 PM	SiCl4 post valve closed
3/17/2010	3:05:30 PM	Bubbler valve closed
3/17/2010	3:05:30 PM	Main Vac valve opened
3/17/2010	3:05:30 PM	Bypass valve opened
3/17/2010	3:05:30 PM	Helium MFC set to  0.000000
3/17/2010	3:05:30 PM	H2 MFC set to  0.000000
3/17/2010	3:05:30 PM	BCl3 MFC set to  0.000000
3/17/2010	3:05:30 PM	SiCl4 MFC set to  0.000000
3/17/2010	3:05:30 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	3:05:30 PM	Tube furnace set to 0
3/17/2010	3:05:30 PM	Run finished at 3:05 PM
3/17/2010	3:05:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	3:25:11 PM	Helium MFC set to  100.000000
3/17/2010	3:25:12 PM	Helium valve opened
3/17/2010	3:26:59 PM	Helium MFC set to  0.000000
3/17/2010	3:27:02 PM	Helium valve closed
3/17/2010	3:27:55 PM	Main Vac valve closed
3/17/2010	3:27:57 PM	Bypass valve closed
3/17/2010	3:28:06 PM	Bypass valve opened
3/17/2010	3:28:06 PM	Main Vac valve opened
3/17/2010	3:28:27 PM	Recipe started at 3:28 PM
3/17/2010	3:28:28 PM	Helium valve closed
3/17/2010	3:28:28 PM	BCl3 valve closed
3/17/2010	3:28:28 PM	PH3 valve closed
3/17/2010	3:28:28 PM	SiCl4 pre valve closed
3/17/2010	3:28:28 PM	SiCl4 post valve closed
3/17/2010	3:28:28 PM	Main Vac valve closed
3/17/2010	3:28:28 PM	Bypass valve closed
3/17/2010	3:28:28 PM	Bubbler valve closed
3/17/2010	3:28:28 PM	H2 valve opened
3/17/2010	3:28:28 PM	Helium MFC set to  0.000000
3/17/2010	3:28:28 PM	H2 MFC set to  500.000000
3/17/2010	3:28:28 PM	BCl3 MFC set to  0.000000
3/17/2010	3:28:28 PM	SiCl4 MFC set to  0.000000
3/17/2010	3:28:28 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	3:28:28 PM	Tube furnace set to 0
3/17/2010	3:29:50 PM	Helium valve closed
3/17/2010	3:29:50 PM	BCl3 valve closed
3/17/2010	3:29:50 PM	PH3 valve closed
3/17/2010	3:29:50 PM	SiCl4 pre valve closed
3/17/2010	3:29:50 PM	SiCl4 post valve closed
3/17/2010	3:29:50 PM	Main Vac valve closed
3/17/2010	3:29:50 PM	Bypass valve closed
3/17/2010	3:29:50 PM	H2 valve opened
3/17/2010	3:29:50 PM	Bubbler valve opened
3/17/2010	3:29:50 PM	Helium MFC set to  0.000000
3/17/2010	3:29:50 PM	H2 MFC set to  500.000000
3/17/2010	3:29:50 PM	BCl3 MFC set to  0.000000
3/17/2010	3:29:50 PM	SiCl4 MFC set to  0.000000
3/17/2010	3:29:50 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	3:29:50 PM	Tube furnace set to 0
3/17/2010	3:49:51 PM	Helium valve closed
3/17/2010	3:49:51 PM	PH3 valve closed
3/17/2010	3:49:51 PM	Main Vac valve closed
3/17/2010	3:49:51 PM	Bypass valve closed
3/17/2010	3:49:51 PM	H2 valve opened
3/17/2010	3:49:51 PM	BCl3 valve opened
3/17/2010	3:49:51 PM	SiCl4 pre valve opened
3/17/2010	3:49:51 PM	SiCl4 post valve opened
3/17/2010	3:49:51 PM	Bubbler valve opened
3/17/2010	3:49:51 PM	Helium MFC set to  0.000000
3/17/2010	3:49:51 PM	H2 MFC set to  475.000000
3/17/2010	3:49:51 PM	BCl3 MFC set to  35.000000
3/17/2010	3:49:51 PM	SiCl4 MFC set to  325.000000
3/17/2010	3:49:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	3:49:51 PM	Tube furnace set to 0
3/17/2010	4:19:51 PM	Helium valve closed
3/17/2010	4:19:51 PM	BCl3 valve closed
3/17/2010	4:19:51 PM	PH3 valve closed
3/17/2010	4:19:51 PM	SiCl4 pre valve closed
3/17/2010	4:19:51 PM	SiCl4 post valve closed
3/17/2010	4:19:51 PM	Main Vac valve closed
3/17/2010	4:19:51 PM	Bypass valve closed
3/17/2010	4:19:51 PM	H2 valve opened
3/17/2010	4:19:51 PM	Bubbler valve opened
3/17/2010	4:19:51 PM	Helium MFC set to  0.000000
3/17/2010	4:19:51 PM	H2 MFC set to  400.000000
3/17/2010	4:19:51 PM	BCl3 MFC set to  0.000000
3/17/2010	4:19:51 PM	SiCl4 MFC set to  0.000000
3/17/2010	4:19:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	4:19:51 PM	Tube furnace set to 0
3/17/2010	4:39:51 PM	H2 valve closed
3/17/2010	4:39:51 PM	BCl3 valve closed
3/17/2010	4:39:51 PM	PH3 valve closed
3/17/2010	4:39:51 PM	SiCl4 pre valve closed
3/17/2010	4:39:51 PM	SiCl4 post valve closed
3/17/2010	4:39:51 PM	Main Vac valve closed
3/17/2010	4:39:51 PM	Bypass valve closed
3/17/2010	4:39:51 PM	Helium valve opened
3/17/2010	4:39:51 PM	Bubbler valve opened
3/17/2010	4:39:51 PM	Helium MFC set to  400.000000
3/17/2010	4:39:51 PM	H2 MFC set to  0.000000
3/17/2010	4:39:51 PM	BCl3 MFC set to  0.000000
3/17/2010	4:39:51 PM	SiCl4 MFC set to  0.000000
3/17/2010	4:39:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	4:39:51 PM	Tube furnace set to 0
3/17/2010	4:54:52 PM	Helium valve closed
3/17/2010	4:54:52 PM	H2 valve closed
3/17/2010	4:54:52 PM	BCl3 valve closed
3/17/2010	4:54:52 PM	PH3 valve closed
3/17/2010	4:54:52 PM	SiCl4 pre valve closed
3/17/2010	4:54:52 PM	SiCl4 post valve closed
3/17/2010	4:54:52 PM	Main Vac valve closed
3/17/2010	4:54:52 PM	Bypass valve closed
3/17/2010	4:54:52 PM	Bubbler valve closed
3/17/2010	4:54:52 PM	Helium MFC set to  0.000000
3/17/2010	4:54:52 PM	H2 MFC set to  0.000000
3/17/2010	4:54:52 PM	BCl3 MFC set to  0.000000
3/17/2010	4:54:52 PM	SiCl4 MFC set to  0.000000
3/17/2010	4:54:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	4:54:52 PM	Tube furnace set to 0
3/17/2010	4:54:52 PM	Run finished at 4:54 PM
3/17/2010	5:04:01 PM	Recipe started at 5:04 PM
3/17/2010	5:04:01 PM	Helium valve closed
3/17/2010	5:04:01 PM	H2 valve closed
3/17/2010	5:04:01 PM	BCl3 valve closed
3/17/2010	5:04:01 PM	PH3 valve closed
3/17/2010	5:04:01 PM	SiCl4 pre valve closed
3/17/2010	5:04:01 PM	SiCl4 post valve closed
3/17/2010	5:04:01 PM	Main Vac valve closed
3/17/2010	5:04:01 PM	Bubbler valve closed
3/17/2010	5:04:01 PM	Bypass valve opened
3/17/2010	5:04:01 PM	Helium MFC set to  0.000000
3/17/2010	5:04:01 PM	H2 MFC set to  0.000000
3/17/2010	5:04:01 PM	BCl3 MFC set to  0.000000
3/17/2010	5:04:01 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:04:01 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:04:01 PM	Tube furnace set to 0
3/17/2010	5:04:32 PM	Helium valve closed
3/17/2010	5:04:32 PM	H2 valve closed
3/17/2010	5:04:32 PM	BCl3 valve closed
3/17/2010	5:04:32 PM	PH3 valve closed
3/17/2010	5:04:32 PM	SiCl4 pre valve closed
3/17/2010	5:04:32 PM	SiCl4 post valve closed
3/17/2010	5:04:32 PM	Bubbler valve closed
3/17/2010	5:04:32 PM	Main Vac valve opened
3/17/2010	5:04:32 PM	Bypass valve opened
3/17/2010	5:04:32 PM	Helium MFC set to  0.000000
3/17/2010	5:04:32 PM	H2 MFC set to  0.000000
3/17/2010	5:04:32 PM	BCl3 MFC set to  0.000000
3/17/2010	5:04:32 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:04:32 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:04:32 PM	Tube furnace set to 0
3/17/2010	5:07:32 PM	H2 valve closed
3/17/2010	5:07:32 PM	BCl3 valve closed
3/17/2010	5:07:32 PM	PH3 valve closed
3/17/2010	5:07:32 PM	SiCl4 pre valve closed
3/17/2010	5:07:32 PM	SiCl4 post valve closed
3/17/2010	5:07:32 PM	Bubbler valve closed
3/17/2010	5:07:32 PM	Helium valve opened
3/17/2010	5:07:32 PM	Main Vac valve opened
3/17/2010	5:07:32 PM	Bypass valve opened
3/17/2010	5:07:32 PM	Helium MFC set to  100.000000
3/17/2010	5:07:32 PM	H2 MFC set to  0.000000
3/17/2010	5:07:32 PM	BCl3 MFC set to  0.000000
3/17/2010	5:07:32 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:07:32 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:07:32 PM	Tube furnace set to 0
3/17/2010	5:09:32 PM	Helium valve closed
3/17/2010	5:09:32 PM	H2 valve closed
3/17/2010	5:09:32 PM	BCl3 valve closed
3/17/2010	5:09:32 PM	PH3 valve closed
3/17/2010	5:09:32 PM	SiCl4 pre valve closed
3/17/2010	5:09:32 PM	SiCl4 post valve closed
3/17/2010	5:09:32 PM	Bubbler valve closed
3/17/2010	5:09:32 PM	Main Vac valve opened
3/17/2010	5:09:32 PM	Bypass valve opened
3/17/2010	5:09:32 PM	Helium MFC set to  0.000000
3/17/2010	5:09:32 PM	H2 MFC set to  0.000000
3/17/2010	5:09:32 PM	BCl3 MFC set to  0.000000
3/17/2010	5:09:32 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:09:32 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:09:32 PM	Tube furnace set to 0
3/17/2010	5:14:33 PM	H2 valve closed
3/17/2010	5:14:33 PM	BCl3 valve closed
3/17/2010	5:14:33 PM	PH3 valve closed
3/17/2010	5:14:33 PM	SiCl4 pre valve closed
3/17/2010	5:14:33 PM	SiCl4 post valve closed
3/17/2010	5:14:33 PM	Bubbler valve closed
3/17/2010	5:14:33 PM	Helium valve opened
3/17/2010	5:14:33 PM	Main Vac valve opened
3/17/2010	5:14:33 PM	Bypass valve opened
3/17/2010	5:14:33 PM	Helium MFC set to  100.000000
3/17/2010	5:14:33 PM	H2 MFC set to  0.000000
3/17/2010	5:14:33 PM	BCl3 MFC set to  0.000000
3/17/2010	5:14:33 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:14:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:14:33 PM	Tube furnace set to 0
3/17/2010	5:16:33 PM	Helium valve closed
3/17/2010	5:16:33 PM	H2 valve closed
3/17/2010	5:16:33 PM	BCl3 valve closed
3/17/2010	5:16:33 PM	PH3 valve closed
3/17/2010	5:16:33 PM	SiCl4 pre valve closed
3/17/2010	5:16:33 PM	SiCl4 post valve closed
3/17/2010	5:16:33 PM	Bubbler valve closed
3/17/2010	5:16:33 PM	Main Vac valve opened
3/17/2010	5:16:33 PM	Bypass valve opened
3/17/2010	5:16:33 PM	Helium MFC set to  0.000000
3/17/2010	5:16:33 PM	H2 MFC set to  0.000000
3/17/2010	5:16:33 PM	BCl3 MFC set to  0.000000
3/17/2010	5:16:33 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:16:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:16:33 PM	Tube furnace set to 0
3/17/2010	5:17:07 PM	Run finished at 5:17 PM
3/17/2010	5:17:31 PM	Main Vac valve closed
3/17/2010	5:17:33 PM	Bypass valve closed
3/17/2010	5:17:46 PM	Bypass valve opened
3/17/2010	5:17:47 PM	Main Vac valve opened
3/17/2010	5:17:53 PM	Helium MFC set to  100.000000
3/17/2010	5:17:54 PM	Helium valve opened
3/17/2010	5:19:28 PM	Helium MFC set to  0.000000
3/17/2010	5:19:28 PM	Helium valve closed
3/17/2010	5:20:35 PM	Recipe started at 5:20 PM
3/17/2010	5:20:35 PM	Helium valve closed
3/17/2010	5:20:35 PM	BCl3 valve closed
3/17/2010	5:20:35 PM	PH3 valve closed
3/17/2010	5:20:35 PM	SiCl4 pre valve closed
3/17/2010	5:20:35 PM	SiCl4 post valve closed
3/17/2010	5:20:35 PM	Main Vac valve closed
3/17/2010	5:20:35 PM	Bypass valve closed
3/17/2010	5:20:35 PM	Bubbler valve closed
3/17/2010	5:20:35 PM	H2 valve opened
3/17/2010	5:20:35 PM	Helium MFC set to  0.000000
3/17/2010	5:20:35 PM	H2 MFC set to  500.000000
3/17/2010	5:20:35 PM	BCl3 MFC set to  0.000000
3/17/2010	5:20:35 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:20:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:20:35 PM	Tube furnace set to 0
3/17/2010	5:21:58 PM	Helium valve closed
3/17/2010	5:21:58 PM	BCl3 valve closed
3/17/2010	5:21:58 PM	PH3 valve closed
3/17/2010	5:21:58 PM	SiCl4 pre valve closed
3/17/2010	5:21:58 PM	SiCl4 post valve closed
3/17/2010	5:21:58 PM	Main Vac valve closed
3/17/2010	5:21:58 PM	Bypass valve closed
3/17/2010	5:21:58 PM	H2 valve opened
3/17/2010	5:21:58 PM	Bubbler valve opened
3/17/2010	5:21:58 PM	Helium MFC set to  0.000000
3/17/2010	5:21:58 PM	H2 MFC set to  500.000000
3/17/2010	5:21:58 PM	BCl3 MFC set to  0.000000
3/17/2010	5:21:58 PM	SiCl4 MFC set to  0.000000
3/17/2010	5:21:58 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:21:58 PM	Tube furnace set to 0
3/17/2010	5:41:58 PM	Helium valve closed
3/17/2010	5:41:58 PM	PH3 valve closed
3/17/2010	5:41:58 PM	Main Vac valve closed
3/17/2010	5:41:58 PM	Bypass valve closed
3/17/2010	5:41:58 PM	H2 valve opened
3/17/2010	5:41:58 PM	BCl3 valve opened
3/17/2010	5:41:58 PM	SiCl4 pre valve opened
3/17/2010	5:41:58 PM	SiCl4 post valve opened
3/17/2010	5:41:58 PM	Bubbler valve opened
3/17/2010	5:41:58 PM	Helium MFC set to  0.000000
3/17/2010	5:41:58 PM	H2 MFC set to  500.000000
3/17/2010	5:41:58 PM	BCl3 MFC set to  50.000000
3/17/2010	5:41:58 PM	SiCl4 MFC set to  400.000000
3/17/2010	5:41:58 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	5:41:58 PM	Tube furnace set to 0
3/17/2010	6:03:58 PM	Helium valve closed
3/17/2010	6:03:59 PM	BCl3 valve closed
3/17/2010	6:03:59 PM	PH3 valve closed
3/17/2010	6:03:59 PM	SiCl4 pre valve closed
3/17/2010	6:03:59 PM	SiCl4 post valve closed
3/17/2010	6:03:59 PM	Main Vac valve closed
3/17/2010	6:03:59 PM	Bypass valve closed
3/17/2010	6:03:59 PM	H2 valve opened
3/17/2010	6:03:59 PM	Bubbler valve opened
3/17/2010	6:03:59 PM	Helium MFC set to  0.000000
3/17/2010	6:03:59 PM	H2 MFC set to  400.000000
3/17/2010	6:03:59 PM	BCl3 MFC set to  0.000000
3/17/2010	6:03:59 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:03:59 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:03:59 PM	Tube furnace set to 0
3/17/2010	6:23:59 PM	H2 valve closed
3/17/2010	6:23:59 PM	BCl3 valve closed
3/17/2010	6:23:59 PM	PH3 valve closed
3/17/2010	6:23:59 PM	SiCl4 pre valve closed
3/17/2010	6:23:59 PM	SiCl4 post valve closed
3/17/2010	6:23:59 PM	Main Vac valve closed
3/17/2010	6:23:59 PM	Bypass valve closed
3/17/2010	6:23:59 PM	Helium valve opened
3/17/2010	6:23:59 PM	Bubbler valve opened
3/17/2010	6:23:59 PM	Helium MFC set to  400.000000
3/17/2010	6:23:59 PM	H2 MFC set to  0.000000
3/17/2010	6:23:59 PM	BCl3 MFC set to  0.000000
3/17/2010	6:23:59 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:23:59 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:23:59 PM	Tube furnace set to 0
3/17/2010	6:38:59 PM	Helium valve closed
3/17/2010	6:38:59 PM	H2 valve closed
3/17/2010	6:38:59 PM	BCl3 valve closed
3/17/2010	6:38:59 PM	PH3 valve closed
3/17/2010	6:38:59 PM	SiCl4 pre valve closed
3/17/2010	6:38:59 PM	SiCl4 post valve closed
3/17/2010	6:38:59 PM	Main Vac valve closed
3/17/2010	6:38:59 PM	Bypass valve closed
3/17/2010	6:38:59 PM	Bubbler valve closed
3/17/2010	6:38:59 PM	Helium MFC set to  0.000000
3/17/2010	6:38:59 PM	H2 MFC set to  0.000000
3/17/2010	6:38:59 PM	BCl3 MFC set to  0.000000
3/17/2010	6:38:59 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:38:59 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:38:59 PM	Tube furnace set to 0
3/17/2010	6:38:59 PM	Run finished at 6:38 PM
3/17/2010	6:44:23 PM	Recipe started at 6:44 PM
3/17/2010	6:44:23 PM	Helium valve closed
3/17/2010	6:44:23 PM	BCl3 valve closed
3/17/2010	6:44:23 PM	PH3 valve closed
3/17/2010	6:44:23 PM	SiCl4 pre valve closed
3/17/2010	6:44:23 PM	SiCl4 post valve closed
3/17/2010	6:44:23 PM	Main Vac valve closed
3/17/2010	6:44:23 PM	Bypass valve closed
3/17/2010	6:44:23 PM	Bubbler valve closed
3/17/2010	6:44:23 PM	H2 valve opened
3/17/2010	6:44:23 PM	Helium MFC set to  0.000000
3/17/2010	6:44:23 PM	H2 MFC set to  500.000000
3/17/2010	6:44:23 PM	BCl3 MFC set to  0.000000
3/17/2010	6:44:23 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:44:23 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:44:23 PM	Tube furnace set to 0
3/17/2010	6:44:24 PM	Run aborted at 6:44 PM
3/17/2010	6:44:24 PM	Helium valve closed
3/17/2010	6:44:24 PM	H2 valve closed
3/17/2010	6:44:24 PM	BCl3 valve closed
3/17/2010	6:44:24 PM	PH3 valve closed
3/17/2010	6:44:24 PM	SiCl4 pre valve closed
3/17/2010	6:44:24 PM	SiCl4 post valve closed
3/17/2010	6:44:24 PM	Bypass valve closed
3/17/2010	6:44:24 PM	Main Vac valve closed
3/17/2010	6:44:24 PM	Bubbler valve closed
3/17/2010	6:44:24 PM	Helium MFC set to  0.000000
3/17/2010	6:44:24 PM	H2 MFC set to  0.000000
3/17/2010	6:44:24 PM	BCl3 MFC set to  0.000000
3/17/2010	6:44:24 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:44:24 PM	Tube furnace set to 0
3/17/2010	6:44:36 PM	Recipe started at 6:44 PM
3/17/2010	6:44:36 PM	Helium valve closed
3/17/2010	6:44:36 PM	H2 valve closed
3/17/2010	6:44:36 PM	BCl3 valve closed
3/17/2010	6:44:36 PM	PH3 valve closed
3/17/2010	6:44:36 PM	SiCl4 pre valve closed
3/17/2010	6:44:36 PM	SiCl4 post valve closed
3/17/2010	6:44:36 PM	Main Vac valve closed
3/17/2010	6:44:36 PM	Bubbler valve closed
3/17/2010	6:44:36 PM	Bypass valve opened
3/17/2010	6:44:36 PM	Helium MFC set to  0.000000
3/17/2010	6:44:36 PM	H2 MFC set to  0.000000
3/17/2010	6:44:36 PM	BCl3 MFC set to  0.000000
3/17/2010	6:44:36 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:44:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:44:36 PM	Tube furnace set to 0
3/17/2010	6:45:07 PM	Helium valve closed
3/17/2010	6:45:07 PM	H2 valve closed
3/17/2010	6:45:07 PM	BCl3 valve closed
3/17/2010	6:45:07 PM	PH3 valve closed
3/17/2010	6:45:07 PM	SiCl4 pre valve closed
3/17/2010	6:45:07 PM	SiCl4 post valve closed
3/17/2010	6:45:07 PM	Bubbler valve closed
3/17/2010	6:45:07 PM	Main Vac valve opened
3/17/2010	6:45:07 PM	Bypass valve opened
3/17/2010	6:45:07 PM	Helium MFC set to  0.000000
3/17/2010	6:45:07 PM	H2 MFC set to  0.000000
3/17/2010	6:45:07 PM	BCl3 MFC set to  0.000000
3/17/2010	6:45:07 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:45:07 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:45:07 PM	Tube furnace set to 0
3/17/2010	6:48:07 PM	H2 valve closed
3/17/2010	6:48:07 PM	BCl3 valve closed
3/17/2010	6:48:07 PM	PH3 valve closed
3/17/2010	6:48:07 PM	SiCl4 pre valve closed
3/17/2010	6:48:07 PM	SiCl4 post valve closed
3/17/2010	6:48:07 PM	Bubbler valve closed
3/17/2010	6:48:07 PM	Helium valve opened
3/17/2010	6:48:07 PM	Main Vac valve opened
3/17/2010	6:48:07 PM	Bypass valve opened
3/17/2010	6:48:07 PM	Helium MFC set to  100.000000
3/17/2010	6:48:07 PM	H2 MFC set to  0.000000
3/17/2010	6:48:07 PM	BCl3 MFC set to  0.000000
3/17/2010	6:48:07 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:48:07 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:48:07 PM	Tube furnace set to 0
3/17/2010	6:50:07 PM	Helium valve closed
3/17/2010	6:50:07 PM	H2 valve closed
3/17/2010	6:50:07 PM	BCl3 valve closed
3/17/2010	6:50:07 PM	PH3 valve closed
3/17/2010	6:50:07 PM	SiCl4 pre valve closed
3/17/2010	6:50:07 PM	SiCl4 post valve closed
3/17/2010	6:50:07 PM	Bubbler valve closed
3/17/2010	6:50:07 PM	Main Vac valve opened
3/17/2010	6:50:07 PM	Bypass valve opened
3/17/2010	6:50:07 PM	Helium MFC set to  0.000000
3/17/2010	6:50:07 PM	H2 MFC set to  0.000000
3/17/2010	6:50:07 PM	BCl3 MFC set to  0.000000
3/17/2010	6:50:07 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:50:07 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:50:07 PM	Tube furnace set to 0
3/17/2010	6:55:08 PM	H2 valve closed
3/17/2010	6:55:08 PM	BCl3 valve closed
3/17/2010	6:55:08 PM	PH3 valve closed
3/17/2010	6:55:08 PM	SiCl4 pre valve closed
3/17/2010	6:55:08 PM	SiCl4 post valve closed
3/17/2010	6:55:08 PM	Bubbler valve closed
3/17/2010	6:55:08 PM	Helium valve opened
3/17/2010	6:55:08 PM	Main Vac valve opened
3/17/2010	6:55:08 PM	Bypass valve opened
3/17/2010	6:55:08 PM	Helium MFC set to  100.000000
3/17/2010	6:55:08 PM	H2 MFC set to  0.000000
3/17/2010	6:55:08 PM	BCl3 MFC set to  0.000000
3/17/2010	6:55:08 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:55:08 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:55:08 PM	Tube furnace set to 0
3/17/2010	6:57:08 PM	Helium valve closed
3/17/2010	6:57:08 PM	H2 valve closed
3/17/2010	6:57:08 PM	BCl3 valve closed
3/17/2010	6:57:08 PM	PH3 valve closed
3/17/2010	6:57:08 PM	SiCl4 pre valve closed
3/17/2010	6:57:08 PM	SiCl4 post valve closed
3/17/2010	6:57:08 PM	Bubbler valve closed
3/17/2010	6:57:08 PM	Main Vac valve opened
3/17/2010	6:57:08 PM	Bypass valve opened
3/17/2010	6:57:08 PM	Helium MFC set to  0.000000
3/17/2010	6:57:08 PM	H2 MFC set to  0.000000
3/17/2010	6:57:08 PM	BCl3 MFC set to  0.000000
3/17/2010	6:57:08 PM	SiCl4 MFC set to  0.000000
3/17/2010	6:57:08 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	6:57:08 PM	Tube furnace set to 0
3/17/2010	7:00:08 PM	Run finished at 7:00 PM
3/17/2010	7:09:31 PM	Main Vac valve closed
3/17/2010	7:09:33 PM	Bypass valve closed
3/17/2010	7:09:42 PM	Bypass valve opened
3/17/2010	7:09:42 PM	Main Vac valve opened
3/17/2010	7:10:16 PM	Recipe started at 7:10 PM
3/17/2010	7:10:16 PM	Helium valve closed
3/17/2010	7:10:16 PM	BCl3 valve closed
3/17/2010	7:10:16 PM	PH3 valve closed
3/17/2010	7:10:16 PM	SiCl4 pre valve closed
3/17/2010	7:10:16 PM	SiCl4 post valve closed
3/17/2010	7:10:16 PM	Main Vac valve closed
3/17/2010	7:10:16 PM	Bypass valve closed
3/17/2010	7:10:16 PM	Bubbler valve closed
3/17/2010	7:10:16 PM	H2 valve opened
3/17/2010	7:10:16 PM	Helium MFC set to  0.000000
3/17/2010	7:10:16 PM	H2 MFC set to  500.000000
3/17/2010	7:10:16 PM	BCl3 MFC set to  0.000000
3/17/2010	7:10:16 PM	SiCl4 MFC set to  0.000000
3/17/2010	7:10:16 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	7:10:16 PM	Tube furnace set to 0
3/17/2010	7:11:39 PM	Helium valve closed
3/17/2010	7:11:39 PM	BCl3 valve closed
3/17/2010	7:11:39 PM	PH3 valve closed
3/17/2010	7:11:39 PM	SiCl4 pre valve closed
3/17/2010	7:11:39 PM	SiCl4 post valve closed
3/17/2010	7:11:39 PM	Main Vac valve closed
3/17/2010	7:11:39 PM	Bypass valve closed
3/17/2010	7:11:39 PM	H2 valve opened
3/17/2010	7:11:39 PM	Bubbler valve opened
3/17/2010	7:11:39 PM	Helium MFC set to  0.000000
3/17/2010	7:11:39 PM	H2 MFC set to  500.000000
3/17/2010	7:11:39 PM	BCl3 MFC set to  0.000000
3/17/2010	7:11:39 PM	SiCl4 MFC set to  0.000000
3/17/2010	7:11:39 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	7:11:39 PM	Tube furnace set to 0
3/17/2010	7:31:39 PM	Helium valve closed
3/17/2010	7:31:39 PM	PH3 valve closed
3/17/2010	7:31:39 PM	Main Vac valve closed
3/17/2010	7:31:39 PM	Bypass valve closed
3/17/2010	7:31:39 PM	H2 valve opened
3/17/2010	7:31:39 PM	BCl3 valve opened
3/17/2010	7:31:39 PM	SiCl4 pre valve opened
3/17/2010	7:31:39 PM	SiCl4 post valve opened
3/17/2010	7:31:39 PM	Bubbler valve opened
3/17/2010	7:31:39 PM	Helium MFC set to  0.000000
3/17/2010	7:31:39 PM	H2 MFC set to  500.000000
3/17/2010	7:31:39 PM	BCl3 MFC set to  50.000000
3/17/2010	7:31:39 PM	SiCl4 MFC set to  400.000000
3/17/2010	7:31:39 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	7:31:39 PM	Tube furnace set to 0
3/17/2010	7:51:40 PM	Helium valve closed
3/17/2010	7:51:40 PM	BCl3 valve closed
3/17/2010	7:51:40 PM	PH3 valve closed
3/17/2010	7:51:40 PM	SiCl4 pre valve closed
3/17/2010	7:51:40 PM	SiCl4 post valve closed
3/17/2010	7:51:40 PM	Main Vac valve closed
3/17/2010	7:51:40 PM	Bypass valve closed
3/17/2010	7:51:40 PM	H2 valve opened
3/17/2010	7:51:40 PM	Bubbler valve opened
3/17/2010	7:51:40 PM	Helium MFC set to  0.000000
3/17/2010	7:51:40 PM	H2 MFC set to  400.000000
3/17/2010	7:51:40 PM	BCl3 MFC set to  0.000000
3/17/2010	7:51:40 PM	SiCl4 MFC set to  0.000000
3/17/2010	7:51:40 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	7:51:40 PM	Tube furnace set to 0
3/17/2010	8:11:40 PM	H2 valve closed
3/17/2010	8:11:40 PM	BCl3 valve closed
3/17/2010	8:11:40 PM	PH3 valve closed
3/17/2010	8:11:40 PM	SiCl4 pre valve closed
3/17/2010	8:11:40 PM	SiCl4 post valve closed
3/17/2010	8:11:40 PM	Main Vac valve closed
3/17/2010	8:11:40 PM	Bypass valve closed
3/17/2010	8:11:40 PM	Helium valve opened
3/17/2010	8:11:40 PM	Bubbler valve opened
3/17/2010	8:11:40 PM	Helium MFC set to  400.000000
3/17/2010	8:11:40 PM	H2 MFC set to  0.000000
3/17/2010	8:11:40 PM	BCl3 MFC set to  0.000000
3/17/2010	8:11:40 PM	SiCl4 MFC set to  0.000000
3/17/2010	8:11:40 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	8:11:40 PM	Tube furnace set to 0
3/17/2010	8:26:40 PM	Helium valve closed
3/17/2010	8:26:40 PM	H2 valve closed
3/17/2010	8:26:40 PM	BCl3 valve closed
3/17/2010	8:26:40 PM	PH3 valve closed
3/17/2010	8:26:40 PM	SiCl4 pre valve closed
3/17/2010	8:26:40 PM	SiCl4 post valve closed
3/17/2010	8:26:40 PM	Main Vac valve closed
3/17/2010	8:26:40 PM	Bypass valve closed
3/17/2010	8:26:40 PM	Bubbler valve closed
3/17/2010	8:26:40 PM	Helium MFC set to  0.000000
3/17/2010	8:26:40 PM	H2 MFC set to  0.000000
3/17/2010	8:26:40 PM	BCl3 MFC set to  0.000000
3/17/2010	8:26:40 PM	SiCl4 MFC set to  0.000000
3/17/2010	8:26:40 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	8:26:40 PM	Tube furnace set to 0
3/17/2010	8:26:41 PM	Run finished at 8:26 PM
3/17/2010	8:29:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2010	8:29:58 PM	Recipe started at 8:29 PM
3/17/2010	8:29:58 PM	Helium valve closed
3/17/2010	8:29:58 PM	H2 valve closed
3/17/2010	8:29:58 PM	BCl3 valve closed
3/17/2010	8:29:58 PM	PH3 valve closed
3/17/2010	8:29:58 PM	SiCl4 pre valve closed
3/17/2010	8:29:58 PM	SiCl4 post valve closed
3/17/2010	8:29:58 PM	Main Vac valve closed
3/17/2010	8:29:58 PM	Bubbler valve closed
3/17/2010	8:29:58 PM	Bypass valve opened
3/17/2010	8:29:58 PM	Helium MFC set to  0.000000
3/17/2010	8:29:58 PM	H2 MFC set to  0.000000
3/17/2010	8:29:58 PM	BCl3 MFC set to  0.000000
3/17/2010	8:29:58 PM	SiCl4 MFC set to  0.000000
3/17/2010	8:29:58 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	8:29:58 PM	Tube furnace set to 0
3/17/2010	8:30:28 PM	Helium valve closed
3/17/2010	8:30:28 PM	H2 valve closed
3/17/2010	8:30:28 PM	BCl3 valve closed
3/17/2010	8:30:28 PM	PH3 valve closed
3/17/2010	8:30:28 PM	SiCl4 pre valve closed
3/17/2010	8:30:28 PM	SiCl4 post valve closed
3/17/2010	8:30:28 PM	Bubbler valve closed
3/17/2010	8:30:28 PM	Main Vac valve opened
3/17/2010	8:30:28 PM	Bypass valve opened
3/17/2010	8:30:28 PM	Helium MFC set to  0.000000
3/17/2010	8:30:28 PM	H2 MFC set to  0.000000
3/17/2010	8:30:28 PM	BCl3 MFC set to  0.000000
3/17/2010	8:30:28 PM	SiCl4 MFC set to  0.000000
3/17/2010	8:30:28 PM	Bypass solenoid MFC set to  0.000000
3/17/2010	8:30:28 PM	Tube furnace set to 0
3/17/2010	8:30:28 PM	Run finished at 8:30 PM
3/17/2010	8:30:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
